Silicon-Rich Oxide Obtained by Low-Pressure Chemical Vapor …
网页2016年8月31日 · Off stoichiometric silicon oxide (with empirical formula SiO x), also known as silicon-rich oxide (SRO), is a good material to be used as a light source in all-silicon optoelectronics circuit . It is obtained by different techniques, including plasma-enhanced and low-pressure chemical vapor deposition (PECVD and LPCVD) methods.
科普：金属硅化物工艺技术详解 - 电子工程世界
网页SAB薄膜的材料包括富硅氧化物SRO（Silicon Rich Oxide）、SiO2、SiON和Si3N4。 其中，SRO薄膜的硅含量比常规的氧化硅薄膜大，SRO的制备与常规氧化硅大致相同，都可以通过PECVD淀积，气体源是SiH4、O2和Ar。
Optical and electrical properties of silicon rich oxide films for ...
网页2006年11月8日 · SRO is a variation of silicon dioxide, in which the content of silicon is changed. Depending on the excess of the Si content, SRO possesses some special properties such as charge trapping, carrier transportation and photoluminescence. Some novel devices have been proposed using these properties [3], [4], [5], [6].
Optical characterization of silicon rich oxide films - ScienceDirect
网页2008年3月10日 · Silicon rich oxide (SRO) films with different silicon excess were deposited by low pressure chemical vapor deposition (LPCVD) using SiH 4 and N 2 O as the reactant gasses. A set of SRO films was implanted with silicon ions (SI-SRO).
Modelling atomic and nanoscale structure in the silicon–oxygen …
网页2024年3月2日 · Elemental silicon and its oxide, silica (SiO 2), are widely studied building blocks of the world around us 1: from minerals in geology to silicon-based computing architectures; thin-film...
Improved Photoluminescence Intensity of Silicon Rich Oxide Film …
网页Abstract: Silicon rich oxide (SRO) films are a promising material to develop silicon-based light sources, a key device in Silicon Photonics. Nevertheless, it has been experimentally shown that a surface oxide layer is formed on the SRO films after a thermal annealing process, which possibly does not contribute to light emission.
Optical properties of silicon rich silicon oxides obtained by PECVD
网页2004年1月1日 · Oxide surrounded silicon nanocrystals can be obtained by thermally estimulated segregation of excess silicon in substoichiometric oxides (SiO X, 0<X<2). Still, post-deposition thermal treatments also affect oxides impurity content and mechanical and optical properties, which directly affect.
Surface and Interface Structure of Silicon Rich Oxide Films
网页In this work we study the morphology surface and interface of the silicon rich oxide (SRO) films with different nanocrystals (nc-Si) embedded in a thin SiO 2 matrix (Silicon excess). Also the surface roughness after annealing was investigated by means of Atomic Force Microscopy (AFM).
Structural and optical properties of silicon rich oxide films in …
网页2016年7月20日 · In this work, the effect of the stoichiometry and structure on the optical properties of silicon rich oxide (SRO) films in a multilayered (ML) structure is studied. SRO MLs with silicon excess gradually increased towards the top and bottom and towards the center of the ML produced through the variation of the stoichiometry in each SRO layer ...
On the Origin of Light Emission in Silicon Rich Oxide Obtained by …
网页Silicon Rich Oxide (SRO) is a multiphase material composed of elemental Si, SiO 2, and SiO x, with x between 0 and 2. DiMaria and coworkers distinguished between low and high density of elemental silicon (or silicon excess); films with low silicon excess were named “off stoichiometric oxide” [1].